Tungsten-doped diamond-like carbon (W-DLC) films were prepared by magnetron sputtering, followed by annealing in the temperature range of 100–500°C. The effects of the annealing treatment on the chemical compositions, mechanical properties and tribological behaviours of annealed W-DLC films with a base oil were tested by scanning electron microscopy, atomic force microscopy, Raman spectroscopy, x-ray diffraction and nanoindenter tests. The results indicated that increasing the annealing temperature led to a decrease in the thicknesses and hardness values of the W-DLC films due to the graphitization and oxidation of the film surfaces. However, the structures of the W-DLC films annealed at 500°C were destroyed. Under poly-alpha olefin lubrication, when the annealing temperature was lower than 300°C, the tribological properties of the W-DLC films were stable. This occurred because the graphitization of the sample surface was conducive to the removal of abrasive particles.,This research was financially supported by the National Natural Science Foundation of China (51875537, 41872183), the Pre-Research Program in National 14th Five-Year Plan (80923010602) and Fundamental Research Funds for the Central University (2652018094).