Purpose - Three types of pattern on the monocrystalline silicon surface were prepared by using laser surface processing equipment. The DLC film and Si-DLC film on the patterning surface were deposited by using PECVD-2D plasma chemical vapor deposition sets. The paper aims to discuss these issues. Design/methodology/approach - The tribological properties of the films were investigated by using the UMT-2 micro friction and wear tester. The surface topography, composition, hardness and elastic modular of the films were determined by Raman spectrum, nano mechanics tester and three-dimensional topography instrument. The worn surface topographies of the surface patterning films were tested by scanning electron microscopy. Findings - The results show that the patterning monocrystalline silicon substrate surface has good anti-friction property under low load. The patterning DLC film and Si-DLC film surface have very good anti-friction property under all the test loads. The reason of these results is that the surface patterning film not only reduces the real contact area of the friction pairs but also has low surface bonding force. Originality/value - This paper prepared three kinds of microscopic patterns on the monocrystalline silicon surface by using laser surface processing equipment. And then deposited DLC film and Si-DLC film on the patterning surface. All kinds of surface patterning monocrystalline silicon had very good anti-friction property under low load. And all kinds of surface patterning nano-hard film had perfect anti-friction property under all test loads.