Titanium carbonitride (TiCN) is well-known as a popular hard coating in various applications due to its mechanical, wear, and corrosion resistance properties. In this study, TiCN coatings were applied to the NiTi substrate through physical vapor deposition (PVD) using two types of targets. A desired TiCN (TCN1 sample) was relatively achieved by the Ti-Al target. However, a non-stoichiometric TiCN (TCN2 sample) was obtained through the Ti target. The influence of the target was studied on the coating composition, microstructure, adhesion strength, porosity, and also wear behaviour. With regard to their physical properties (porosity and defects), TCN2 showed a more uniform coating with an adequate adhesion compared to TCN1. Wear properties of the NiTi substrate were also improved using both TiCN coatings, however, TCN2 presented more desired wear behaviour. TCN2 deposited sample possesses a thinner wear track, lower friction coefficient, and smoother surface with lower oxidation in comparison to TCN1 after the wear test. Abrasion, oxidation, and ploughing mechanisms of wear were observed in NiTi substrate, while a slight change of surface feature and composition, negligible oxidation, and minor adhesive particles were detected on the worn surface of TCN2 sample.