With the rapid advancement of Internet of Things (IoT) technology, automotive and aerospace sectors urgently require high-g, high-sensitivity self-powered acceleration sensors exceeding 100 g measurement ranges. Triboelectric nanogenerator (TENG)-based self-powered acceleration sensors show application potential but face three core limitations: narrow measurement ranges (typically <100 g), insufficient sensitivity, and bulky footprints. This study designed a novel TENG self-powered acceleration sensor achieving over 1000 g dynamic range and miniaturization through integrated modified MEMS L-beam structures. Simultaneously, polystyrene nanosphere self-assembly constructed bowl-shaped/triangular microarrays on polydimethylsiloxane (PDMS) and aluminum triboelectric layers, enabling a 5.4-fold sensitivity enhancement in forward/reverse sensing units—increasing from 9.35 mV/g and 9.27 mV/g to 50.89 mV/g and 51.50 mV/g respectively—with Pearson correlation coefficients reaching 0.99988 and 0.99984, demonstrating near-perfect linearity. Experimental verification confirms the sensor's combined advantages of broad dynamic range, high sensitivity, excellent long-term stability, and thermal robustness, providing innovative solutions for automotive crash safety monitoring and spacecraft high-impact environment detection.
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