Metal oxide semiconductor (MOS) gas sensors hold significant promise for applications in public safety, health diagnostics, and industry. However, these sensors typically require high operating temperatures, which lead to poor stability and high power consumption. This paper reports a triboelectric plasma regulated ZnO film based ultra-low power consumption room-temperature acetone gas sensor. The triboelectric nanogenerator (TENG) induces negative corona discharge to ionize the air, generating O 2 - which adsorbs onto the surface of the ZnO film to form a gas ion gate, effectively reducing the background current of the ZnO film. This mechanism enables ultra-low power consumption in the device. Additionally, continuous plasma bombardment generates a large number of V o + in the ZnO film, and the adsorbed O 2 - amically reacts with V o + to form highly reactive oxygen species O 2 -(V o +), which enhance its room-temperature detection capability for acetone gas. This dual-function regulation mechanism—simultaneously reducing background current and promoting the formation of reactive oxygen species—enables excellent room-temperature detection performance for acetone. As a result, the minimum power consumption of 11 pW at room temperature can be obtained. Our findings provide an effective strategy for realizing low power consumption acetone gas sensing.
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