In this study, the wear performance of plasma nitrided and DLC coated AISI 316L stainless steel were studied. Nitrided samples were compared with the duplex ones (PN + Cr/WC/DLC). The Cr/WC/DLC films were deposited by a PECVD-MS process. As a result, it was concluded that the nitride-free nitrided layer formed on the soft 316L substrate through low-temperature plasma nitriding exhibits high hardness. Additionally, it provides excellent load-bearing capacity for the deposition of the Cr/WC/DLC film, reducing the hardness gradient of the composite coating. The wear rate of PN + Cr/WC/DLC coatings is an order of magnitude lower than that of the PN layer, demonstrating superior wear performance. The wear mechanism of 316L is predominantly adhesive wear, while the PN layer mainly undergoes abrasive and oxidative wear. In contrast, the PN + Cr/WC/DLC coating displays nearly imperceptible wear tracks, indicating superior wear resistance.
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