TaCN/NbCN multilayers with varying modulation periods, as well as TaCN and NbCN monolayers, were prepared on Si substrates using magnetron sputtering. Detailed investigation about the microstructure, mechanical and tribological properties of the multilayer films was conducted, focusing specifically on the effects of modulation periods. The results reveal that TaCN/NbCN multilayers exhibited the face centered cubic structure with a (111) preferred orientation. Notably, the hardness and fracture toughness of multilayer films increase with increase of the modulation periods. When the modulation periods reached 30 nm, the hardness and fracture toughness of the TaCN/NbCN multilayers reached the maximum values of 42.88 ± 0.87 GPa and 2.9 ± 0.088 MPa m 1/2, respectively. This strengthening effect can be attributed to the synergistic action of the modulus difference and the alternating stress field. Furthermore, the multilayer had the lowest wear rate (1.68×10 -7 mm 3/N⋅m) and coefficient of friction (∼0.19). The lower coefficient of friction observed in multilayer films could be attributed to the formation of TM 2O 3 during the friction process, which enhanced the self-lubricating properties of the film.