The development of nitride coatings with super hardness (≥40 GPa) has drawn substantial attention due to their anticipated applications in the modern industrial domain. In this study, (AlTiSiMo)N x multi-component nitride coatings, designated as N0, N5, N10, and N12, were deposited through reactive DC magnetron sputtering at varying nitrogen (N 2) flow rates of 0, 5, 10, and 12 sccm, respectively. The impact of nitrogen on the elemental composition, phase structure, mechanical attributes, and tribological aspects of the coatings was comprehensively investigated. The GIXRD analysis revealed that an increase in nitrogen concentration leads to a transition from an amorphous structure to a face-centered cubic (FCC) arrangement, with all metal components forming robust bonds with nitrogen. Furthermore, the nitrogen-rich coatings exhibited significant oxidation resistance after post-annealing treatment at 800 °C and 1000 °C temperatures. The N10 coating, with an optimized nitrogen concentration of 42.32 at%, exhibits remarkable properties, including a super hardness and elastic modulus of 42.3 ± 0.5 GPa and 361.39 ± 0.5 GPa, respectively. It also showcases the highest values for H/E (0.117) and H 3/E 2 (0.579 GPa), enhancing its resistance to impact fatigue and wear. As a result, the N10 coating demonstrates excellent adhesion strength (L c1 = 13.4 N, L c2 = 35.1 N, and CPRs = 290.78 N 2) along with the lowest coefficient of friction (COF) at approximately 0.4 (room temperature), positioning it as a strong contender for use in harsh environments.