The multiphase (AlCrTiV)C x high-entropy alloy (HEA) films, characterized by enhanced friction-reducing and wear-resistant properties, were prepared by magnetron sputtering. The results indicate that, in comparison to the amorphous AlCrTiV film, the (AlCrTiV)C x HEA films show a multiphase structure comprising B1-type FCC carbide phase, and amorphous carbon phase. When the CH 4 flow rate exceeds 6 sccm, a graphite-like ordered sp 2 phase is observed. As the C content increases, the hardness and elastic modulus of the (AlCrTiV)C x HEA films first increase and then decrease, achieving the maximum values (hardness of 13.83 GPa and elastic modulus of 219.2 GPa) at the CH 4 flow rate of 6 sccm. The introduction of C significantly enhances the friction reduction performance of the (AlCrTiV)C x HEA films, resulting in a decrease in the friction coefficient, which reaches a minimum value of 0.230 at the CH 4 flow rate of 6 sccm. However, the wear rate of the (AlCrTiV)C x HEA films generally exhibits an increasing trend, with a minimum value of 2.14 × 10 -5 mm 3/Nm at the CH 4 flow rate of 2 sccm. The variations in friction coefficient and wear rate are attributed to the differing proportions of graphite-like order sp 2 phase at varying C contents. In comparison, the film deposited at the CH 4 flow rate of 10 sccm exhibits a relatively low friction coefficient and wear rate, indicating optimal tribological performance. This suggests its potential for engineering applications focused on enhancing the tribological performance of mechanical equipment components.