Effect of peak power on microstructure, mechanical and tribological properties of W-Ti-C-N(O) ceramic films produced by hybrid sputtering

This research investigates the impact of peak power (from 44 to 105   kW) on the structural and tribological properties of W-Ti-C-N(O) films. Chemical analysis of the coatings, using energy-dispersive spectroscopy and Raman spectroscopy, indicates that increasing target power results in a rise in the oxygen (from 2.6 to 12.0 at. %), carbon (from 19.7 to 32.4 at. %), and sp3 (from 9.8 to 24.3%) content. Morphological and topographical analysis reveal that an increase in target power causes a transition from a columnar structure (with nodular grains) to a dense structure (with textured grains). The indentation and dry sliding tests demonstrate that the maximum level of H/E2 (0.00047   GPa-1) is achieved, along with a low wear rate of 8.1×10-7  mm3/N.m.

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成果名称:低表面能涂层

合作方式:技术开发

联 系 人:周老师

联系电话:13321314106

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成果名称:低表面能涂层

合作方式:技术开发

联 系 人:周老师

联系电话:13321314106

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成果名称:低表面能涂层

合作方式:技术开发

联 系 人:周老师

联系电话:13321314106

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成果名称:低表面能涂层

合作方式:技术开发

联 系 人:周老师

联系电话:13321314106

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