Design/methodology/approach The titanium alloys were chemically mechanically polished under various temperatures. The removal rate and surface roughness were characterized using a three-dimensional topography tester. The surface composition, content and valence state were characterized by X-ray photoelectron spectroscopy. The abrasion performance of the surface reaction layers was conducted using a friction wear testing machine. Findings The thermal activation temperature can enhance the chemical-mechanical polishing effect of titanium alloy. The thermal activation temperature can enhance the oxidation complexation synergistic effect of K2S2O8 and KF on titanium alloy, thereby improving the polishing effect. With the increase in temperature, the wear resistance of titanium alloy decreases after oxidation corrosion, making it more susceptible to removal through friction. By promoting the oxidation and corrosion of K2S2O8 and KF on the titanium alloy, higher temperatures can facilitate the formation of easily removable film layers on the surface, thereby enhancing the polishing effect. Practical implications This research contributes to enriching the theoretical framework of precision machining of titanium alloy and enhancing surface quality and machining efficiency. Originality/value With this statement, the authors hereby certify that the manuscript is the result of their own effort and ability. They have indicated all quotes, citations and references. Furthermore, the authors have not submitted any essay, paper or thesis with similar content elsewhere. No conflict of interest exists in the submission of this manuscript. Peer review The peer review history for this article is available at: https://publons.com/publon/10.1108/ILT-05-2024-0167/