Zinc dialkyldithiophosphate (ZDDP), as the most prominent lubrication additive, forms tribofilms consisting primarily of zinc phosphate glasses containing sulfides. As sulfur is linked to environmental concerns, sulfur-free zinc phosphate coatings have been sputtered from a Zn 3(PO 4) 2 target and investigated here. Based on the bridging to non-bridging oxygen ratio, determined by X-ray photoelectron spectroscopy (XPS), the as deposited coatings are classified as metaphosphates. As the annealing temperature is increased, the chain lengths are reduced, as witnessed by XPS data indicated by a loss of phosphorus and oxygen of the coating surface, likely due to hydrolysis with water from the atmosphere. Transmission electron microscopy energy-dispersive X-ray spectroscopy line scans show that the XPS-revealed composition change of the coating surface upon annealing occurs over the whole thickness of the coating. This alteration in composition and chain length reductions causes a rise in hardness, reduced Young's modulus, and wear resistance. Therefore, the properties of the artificial zinc phosphate tribofilms can be tailored via a thermally stimulated composition change, causing an alternation in chain length from meta- to orthophosphate and thereby enabling the design of coatings with desired mechanical properties.