In this study, CoCrNiTi medium entropy alloy films were fabricated using direct current magnetron sputtering. A comprehensive analysis was conducted to evaluate how varying Ti content influences the microstructural evolution, mechanical behavior, wear performance, and corrosion resistance of (CoCrNi) 100-xTi x films. The results indicate that CoCrNiTi films with varying Ti contents are predominantly composed of both Face-Centered Cubic and amorphous phases. As the Ti content increases, the film exhibits an increased tendency towards the amorphous phase, driven by atomic size mismatches. The hardness, toughness, and adhesion strength of the films initially increase with rising Ti content, followed by a subsequent decrease. Notably, when the Ti content reaches 12.5 at.%, the film demonstrates maximum hardness (13.25 GPa), toughness, and bonding strength (28.5 N). The wear resistance of these films is influenced by strength, toughness, and bonding performance, exhibiting a similar trend across all three factors. At a Ti content of 12.5 at.%, the wear rate reaches its minimum value of 0.56 × 10 −4 ·mm 3/(N ·m). The predominant wear mechanism observed is adhesive wear. With increasing Ti content, the films become denser and more amorphous. Notably, the CoCrNiTi film with 23.4 at.% Ti exhibits optimal corrosion resistance.
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